Silicon Grinding Machine Silicon Grinding Process
A grinding and polishing machine capable of improving productivity is provided. When grinding polishing the surface of the silicon block 2, the front and back in the longitudinal direction of the silicon block 2 are held by chucking portions 12a and 12b that mechanically chuck, and in this state, the side surface of the silicon block 2 is held. 5 and the corner 6 connecting them are ground ...